Semiconductor Packaging
Tokyo Electron America
Parking lot, 9501 Innovation Dr, Manassas, VA 20110, United States
About Tokyo Electron America
Tokyo Electron America operates from Manassas, Virginia, as the U.S. arm of Tokyo Electron Ltd., a Japanese public company that has cultivated semiconductor process technology for over six decades. The American subsidiary focuses on developing, manufacturing, and selling semiconductor production equipment while providing related technical support and parts services. The company’s product portfolio spans the front-end fabrication line: the Ulucus™ G wafer thinning system and Ulucus™ LX extreme laser lift-off tool for 300 mm wafers; Episode™ 1 and Episode™ 2 DMR single-wafer deposition systems; CLEAN TRACK™ LITHIUS Pro DICE™ coater/developer; EVAROS™ batch thermal processing system; LEXIA™-EX sputtering system; Acrevia™ gas cluster beam system for EUV patterning; and the Prexa™ SDP device prober. A dedicated entity, TEL Manufacturing and Engineering of America, handles domestic production and achieved RBA VAP Platinum status in 2026. Tokyo Electron states its mission is to contribute to a "dream-inspiring society" by advancing the semiconductor technology that underpins modern electronics, leveraging more than 60 years of process know-how to improve equipment productivity and field operation efficiency through digital transformation concepts like Epsira™.
Manufacturing capabilities
Core processes
Finishing & coating
Inspection & quality
Assembly & services
Industries served
- Semiconductor manufacturing
- Logic foundry
- Memory fabrication
- Advanced packaging
Equipment
- Ulucus™ G wafer thinning system
- Ulucus™ LX extreme laser lift-off system
- Episode™ 1 single-wafer deposition system
- Episode™ 2 DMR deposition system
- CLEAN TRACK™ LITHIUS Pro DICE™ coater/developer
- EVAROS™ batch thermal processing system
- LEXIA™-EX sputtering system
- Acrevia™ gas cluster beam system
- Prexa™ SDP device prober
Company details
- Location
- Manassas, Virginia
- Company type
- Manufacturer
Frequently asked questions
Where is Tokyo Electron America located?
Tokyo Electron America is located at Parking lot, 9501 Innovation Dr, Manassas, VA 20110, United States.
What does Tokyo Electron America do?
Tokyo Electron America is listed under Semiconductor Packaging, and its listed capabilities and products include Semiconductor equipment manufacturing, Wafer thinning (300 mm), Single-wafer deposition, Wafer coating and developing, Batch thermal processing and Sputtering (PVD).
What industries does Tokyo Electron America serve?
Tokyo Electron America lists Semiconductor manufacturing, Logic foundry, Memory fabrication and Advanced packaging among the industries it serves.
How do I request a quote from Tokyo Electron America?
Use the Request a quote button on this page to send Tokyo Electron America your requirements through FirmsLedger, or call (571) 921-3900 and visit tel.com.
What companies are similar to Tokyo Electron America?
Other Semiconductor Packaging companies in Virginia listed on FirmsLedger include Virginia Semiconductor Inc, James River Semiconductor, Inc and Fuji Electric Corp. of America.